Emerging graphene-based on-chip ESD protection


Authors: Cheng Li, Qi Chen, Jimmy Ng, Mengfu Di, Zijin Pan, Talmage Jones, Ya-hong Xie, Jonathan Hopkins, Prof. Albert Z Wang


Authors

Cheng Li

Dept. of ECE, University of California, Riverside CA

Qi Chen

Dept. of ECE, University of California, Riverside CA

Jimmy Ng

Dept. of ECE, University of California, Los Angeles CA

Mengfu Di

Dept. of ECE, University of California, Riverside CA

Zijin Pan

Dept. of ECE, University of California, Los Angeles CA

Talmage Jones

Dept. of ECE, University of California, Los Angeles CA

Ya-hong Xie

Dept. of ECE, University of California, Los Angeles CA

Jonathan Hopkins

Dept. of ECE, University of California, Los Angeles CA

Prof. Albert Z Wang

Dept. of ECE, University of California, Riverside CA

Publication History

Received: June 01, 2021

Accepted: July 27, 2021

Published: August 12, 2021


Abstract


Electrostatic discharge (ESD) protection is required for all integrated circuits (ICs) against ESD failures. For decades, on-chip ESD protection relies on PN-junction-based active device structures inside Si for ESD discharge, which inherently has ESD-induced parasitic effects, including capacitance, leakage, and noise, which seriously affect IC performance. Addressing the ESD design overhead is an emerging challenge for ICs at advanced technology nodes. Recently, a non-traditional graphene nano-electromechanical-system (NEMS) ESD protection structure has been explored as an alternative low-parasitic ESD protection solution for advanced ICs, which is an above-IC mechanical switch that has the potential to dramatically reduce the ESD design overhead inherent to any in-Si ESD protection structures. Benefited from its unique materials properties, graphene was also studied as interconnects for on-chip ESD protection, possibly replacing traditional metal interconnects for ICs. This paper provides an overview of recent advances in developing graphene-based on-chip ESD protection for future ICs. Statistic studies show excellent ESD protection capability of graphene NEMS (gNEMS) ESD switches, i.e., >1.5KV/µm2, and graphene ESD interconnects, i.e., ~108 A/cm2, suggesting a potential paradigm change in on-chip ESD protection for future chips. The outlook for graphene-based ESD protection will be discussed too.


Keywords: Graphene, ESD, interconnects, gNEMS



Pubmed Style

Prof. Albert Z Wang, Cheng Li, Qi Chen, Jimmy Ng, Mengfu Di, Zijin Pan, Talmage Jones, Ya-hong Xie, Jonathan Hopkins. Emerging graphene-based on-chip ESD protection. materials. 2021; 12 (August 2021): 86-91. doi:10.24911/AAAFMMat/7-241

Web Style

Prof. Albert Z Wang, Cheng Li, Qi Chen, Jimmy Ng, Mengfu Di, Zijin Pan, Talmage Jones, Ya-hong Xie, Jonathan Hopkins. Emerging graphene-based on-chip ESD protection. http://materials.aaafmjournals.org/10.24911/AAAFMMat/7-241 [Access: December 02, 2021]. doi:10.24911/AAAFMMat/7-241

AMA (American Medical Association) Style

Prof. Albert Z Wang, Cheng Li, Qi Chen, Jimmy Ng, Mengfu Di, Zijin Pan, Talmage Jones, Ya-hong Xie, Jonathan Hopkins. Emerging graphene-based on-chip ESD protection. materials. 2021; 12 (August 2021): 86-91. doi:10.24911/AAAFMMat/7-241

Vancouver/ICMJE Style

Prof. Albert Z Wang, Cheng Li, Qi Chen, Jimmy Ng, Mengfu Di, Zijin Pan, Talmage Jones, Ya-hong Xie, Jonathan Hopkins. Emerging graphene-based on-chip ESD protection. materials. (2021), [cited December 02, 2021]; 12 (August 2021): 86-91. doi:10.24911/AAAFMMat/7-241

Harvard Style

Prof. Albert Z Wang, Cheng Li, Qi Chen, Jimmy Ng, Mengfu Di, Zijin Pan, Talmage Jones, Ya-hong Xie, Jonathan Hopkins (2021) Emerging graphene-based on-chip ESD protection. materials, 12 (August 2021): 86-91. doi:10.24911/AAAFMMat/7-241

Turabian Style

Prof. Albert Z Wang, Cheng Li, Qi Chen, Jimmy Ng, Mengfu Di, Zijin Pan, Talmage Jones, Ya-hong Xie, Jonathan Hopkins. 2021. Emerging graphene-based on-chip ESD protection. AAAFM Materials, 12 (August 2021): 86-91. doi:10.24911/AAAFMMat/7-241

Chicago Style

Prof. Albert Z Wang, Cheng Li, Qi Chen, Jimmy Ng, Mengfu Di, Zijin Pan, Talmage Jones, Ya-hong Xie, Jonathan Hopkins. "Emerging graphene-based on-chip ESD protection." AAAFM Materials 12 (2021), 86-91. doi:10.24911/AAAFMMat/7-241

MLA (The Modern Language Association) Style

Prof. Albert Z Wang, Cheng Li, Qi Chen, Jimmy Ng, Mengfu Di, Zijin Pan, Talmage Jones, Ya-hong Xie, Jonathan Hopkins. "Emerging graphene-based on-chip ESD protection." AAAFM Materials 12.August 2021 (2021), 86-91. Print. doi:10.24911/AAAFMMat/7-241

APA (American Psychological Association) Style

Prof. Albert Z Wang, Cheng Li, Qi Chen, Jimmy Ng, Mengfu Di, Zijin Pan, Talmage Jones, Ya-hong Xie, Jonathan Hopkins (2021) Emerging graphene-based on-chip ESD protection. AAAFM Materials, 12 (August 2021), 86-91. doi:10.24911/AAAFMMat/7-241